Monolayer Nitrogen-Atom Distributions in Ultrathin Gate Dielectrics by Low-Temperature Low-Thermal-Budget Processing
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1995-12-30
著者
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Parker Chris
Department Of Electrical And Computer Engineering North Carolina State University
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Hattangady Sunil
Department Of Materials Science And Engineering North Carolina State University
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LUCOVSKY Gerald
Departments of Physics, Materials Science and Engineering, and Electrical and Computer Engineering,
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NIIMI Hiro
Departments of Physics, Materials Science and Engineering, and Electrical and Computer Engineering,
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Lee David
Department Of Materials Science And Engineering North Carolina State University
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Hauser John
Department Of Electrical And Computer Engineering North Carolina State University
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Niimi H
Hokkaido Univ. Sapporo Jpn
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Niimi Hiro
Department Of Physics North Carolina State University
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JING Ze
Department of Physics, North Carolina State University
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Jing Ze
Department Of Physics North Carolina State University
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Lucovsky G
Departments Of Physics And Electrical And Computer Engineering North Carolina State University
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Lucovsky Gerald
Department Of Physics Materials Science And Engineering And Electrical And Computer Engineering Nort
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Lee David
Department Of Biological Science Florida International University
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- Characterization of the Interface between Plasma-Oxidized SiO_2 and Crystalline Silicon by Cathodoluminescence Spectroscopy (CLS)
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