Characterization of the Interface between Plasma-Oxidized SiO_2 and Crystalline Silicon by Cathodoluminescence Spectroscopy (CLS)
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概要
- 論文の詳細を見る
- 1998-09-07
著者
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LUCOVSKY Gerald
Departments of Physics, Materials Science and Engineering, and Electrical and Computer Engineering,
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NIIMI Hiro
Departments of Physics, Materials Science and Engineering, and Electrical and Computer Engineering,
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Niimi Hiro
Department Of Physics North Carolina State University
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SCHAFER Joerg
Department of Electrical Engineering, Ohio State University
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YOUNG Alex
Department of Electrical Engineering, Ohio State University
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BRILLSON Leonard
Department of Electrical Engineering, Ohio State University
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Young Alex
Department Of Electrical Engineering Ohio State University
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Schafer Joerg
Department Of Electrical Engineering Ohio State University
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Lucovsky Gerald
Department Of Physics Materials Science And Engineering And Electrical And Computer Engineering Nort
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Lucovsky Gerald
Department Of Physics North Carolina State University
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Brillson Leonard
Department Of Electrical Engineering Ohio State University
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- Characterization of the Interface between Plasma-Oxidized SiO_2 and Crystalline Silicon by Cathodoluminescence Spectroscopy (CLS)
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