Composition Dependence of Equal Thickness Fringes in an Electron Microscope Image of GaAs/Al_xGa_<1-x> As Multilayer Structure
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概要
- 論文の詳細を見る
A new method is presented for the composition analysis of GaAs/Al_xGa_<1-x>As multilayer structure using transmission electron microscopy. It is found that the position of equal thickness fringe observed at the edge of a cleaved chip is closely related to the composition. Change in Al composition in GaAs/Al_xGa_<1-x>As superstructure is observed as a shift of the equal thickness fringe. Compositional abruptness at the heterointerface and compositional fluctuation in the thin layer can be estimated in the electron microscope image.
- 社団法人応用物理学会の論文
- 1985-12-20
著者
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Nagata Fumio
Central Research Laboratory Hitachi Ltd
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Kakibayashi Hiroshi
Central Research Laboratory Hitachi Ltd
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