Influence of Ion Sputtering on Auger Electron Spectroscopy Depth-Profiling of GaAs / AlGaAs Superstructure
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1988-01-20
著者
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Mishima Tomonori
Central Research Laboratory Hitachi Ltd.
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KAKIBAYASHI Hiroshi
Central Research Laboratory, Hitachi Ltd.
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MATSUNAGA Fumiko
Central Research Laboratory, Hitachi, Ltd.
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KAWASE Susumu
Central Research Laboratory, Hitachi, Ltd.
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Kawase S
Osaka Univ. Osaka Jpn
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Kawase Susumu
Central Research Laboratory Hitachi Ltd.:(present Address) Hitachi Research Institute
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Kakibayashi Hiroshi
Central Research Laboratory Hitachi Ltd
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Matsunaga F
Central Research Laboratory Hitachi Ltd.
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Matsunaga Fumiko
Central Research Laboratory Hitachi Ltd
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- Influence of Ion Sputtering on Auger Electron Spectroscopy Depth-Profiling of GaAs / AlGaAs Superstructure
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