Emission Cross Sections of Excited Fragments Produced by 0-100 eV Electron Impact on SiH_4 : Application of the "He Standard"
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概要
- 論文の詳細を見る
The emission cross sections of excited fragments, SiH(A^2Δ-X^2II), H Balmer lines and Si I, II lines produced from SiH_4 by electron impact were obtained in an energy range below 100 eV. The performed measurements were based on the "He standard". The uncertainties of the obtained values were estimated to be less than 12%. The emission cross section of the Si I(4s^1P°-3p^<21>D) singlet was shown to be almost the same magnitude as that of the Si I(4s^3P°-3p^<23>D) triplet in contrast with the result obtained from a VUV photolyses of SiH_4. The freatures of the optical excitation functions of the atomic fragments were explained in terms of the "ionic core" model.
- 社団法人応用物理学会の論文
- 1986-07-20
著者
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Sato Toshihiko
Department Of Cardiology Tokyo Women's Medical University
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GOTO Toshio
Department of Agricultural Chemistry, Faculty of Agriculture, Nagoya University
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SATO Toshihiko
Department of Electronics, Faculty of Engineering, Nagoya University
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GOTO Toshio
Department of Electronics, Faculty of engineering, Nagoya university
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