Pseudo-Line-Shaped Temperature Distribution Produced by Two-Dimensional Scanning with a Circular Gaussian Electron Beam
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概要
- 論文の詳細を見る
The formalism for calculating the temperature distribution produced in a semi-infinite material by two-demensional scanning with a circular gaussian electron beam, taking its penetration effect into account, has been derived using a Green's function analysis. The pseudo-line condition is examined for the sinusoidal scanning of practical interest, and a set of numerical calculation curves is presented. It is found that the pseudo-line-shaped temperature distribution is drastically changed from a concave to a convex profile by the increase in the oscillating width of the sinusoidal scanning. An approximate application of great technological interest, that of silicon on silicon dioxide, is also discussed.
- 社団法人応用物理学会の論文
- 1984-10-20
著者
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Yamamoto Keiichi
Department Of Electronics Faculty Of Engineering Kobe University
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Yamamoto Keiichi
Department Of Biology Chiba University
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Yamada Masayoshi
Department Of Electronics Faculty Of Engineering Kobe University
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Yamada Masayoshi
Department Of Electronics And Information Science Faculty Of Engineering And Design Kyoto Institute
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YAMAMOTO Keiichi
Department of Bioengineering, Faculty of Engineering, Soka University
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Yamamoto Keiichi
Department of Electronics, Faculty of Engineering, Kobe University
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