The Annealing Behavior of Si-F Bonding Structure of Amorphous Si-F Films
スポンサーリンク
概要
- 論文の詳細を見る
The infrared transmittance and reflectance spectra of amorphous fluorinatedsilicon films (a-Si : F) have beeu? measured as a function of a ratio of SiF./(SiF.-fAr) partial pressure and annealing temperature. The absorption bands wereassigned: 1,015cm ' (SiF. stretching), 965cm-' (Si -F3 stretching), 920cm '(Si-Fz stretching), 870 cm " ((Si-F.). stretching), 825 cm-' (St-F stretching),600 cm ' (St-C stretching or Si2LA mode), 515 cm ' (SiT0 mode), 380 cm "(SiF. bending), and 300 cm ' (Si LA mode). SiF. molecules incorporated intoa-Si : F films are observed in samples prepared with high SiF. partial pressures,but in samples prepared lower SiF. partial pressures dangling bonds seem to besaturated by fluorine atoms. The transition from Si-F, Si-F., and Si-F. groupsto SiF. molecules occurs above annealing temperatures (600'C). The totalfluorine content is constant until crystallization, and a-Si : F films are found to bemore stable than a-Si : H films.
- 社団法人日本物理学会の論文
- 1983-03-15
著者
-
ABE Kenji
Department of Biochemistry 1, Hamamatsu University School of Medicine
-
Yamamoto Keiichi
Department Of Electronics Faculty Of Engineering Kobe University
-
Abe Kenji
Department Of Electronics Faculty Of Engineering Kobe University
-
Washio Katsuyoshi
Department Of Electronics Faculty Of Engineering Kobe University
-
Tsuji Mikio
Department Of Applied Science Faculty Of Engineering Kyushu University
-
Tsuji Mikio
Department Of Applied Science Faculty Of Engineering College Of General Education Kyushu University
-
KASAHARA Hajime
Department of Electronics,Faculty of Engineering,Kobe University
-
Kasahara Hajime
Department Of Electronics Faculty Of Engineering Kobe University
-
Yamamoto Keiichi
Department Of Biology Chiba University
-
Abe Kenji
Department Of Biochemistry 1 Hamamatsu University School Of Medicine
-
Tsuji Mikio
Department Of Electronics Faculty Of Engineering Kobe University
-
KASAHARA Hajime
Department of Electronic Engineering,Faculty of Engineering,Kobe University
-
YAMAMOTO Keiichi
Department of Bioengineering, Faculty of Engineering, Soka University
関連論文
- High expression of Pirh2, an E3 ligase for p27, is associated with low expression of p27 and poor prognosis in head and neck cancers
- ＜Symposium IV＞Oligomeric Aβ is the sole culprit molecule to cause Alzheimer's disease?
- Intermediate-Valence Behavior of YbCu_Al_x around Quantum Critical Point Measured by Resonant Inelastic X-ray Scattering at Yb L_3 Absorption Edge(Condensed matter: electronic structure and electrical, magnetic, and optical properties)
- Hard X-ray Photoemission Spectroscopy of Temperature-Induced Valence Transition in EuNi_2(Si_Ge)_2(Condensed Matter : Electronic Structure, Electrical, Magnetic and Optical Properties)
- Longitudinal Structure Functions in Decaying and Forced Turbulence : Classical Phenomenology and Applications
- Probability Density Function of Longitudinal Velocity Increment in Homogeneous Turbulence
- Conditional Averages and Probability Density Functions in the Passive Scalar Field
- 1P168 クライオ電子顕微鏡法による車軸藻ミオシンの高速移動分子メカニズムの解明(分子モーター,第48回日本生物物理学会年会)
- Brillouin Scattering Studies on Elastic Constants and Polytypes en GaSe_S_x (0≤x≤1) Layered Crystals
- Raman Microprobe Study on Relaxation of Residual Stresses in Patterned Silicon-on-Sapphire
- Raman Scattering Characterization of Residual Stresses in Silicon-on-Sapphire
- Laser-Oscillating-Mode Dependence of Temperature Distributions in Laser Annealing of Semiconductors
- Elastic Constants of GaS and GaSe Layered Crystals Determined by Brillouin Scattering
- Brillouin Scattering in Layered Semiconductors using Microprocessor-controlled Fabry-Perot Interferometer : Physical Acoustics II
- Relief of Residual Strain in Silicon-on-Sapphire by Heat-Assisted Pulsed-Laser Annealing
- Anomalous Residual-Stress in Pulsed-Laser-Annealed Silicon-on-Sapphire Revealed by Raman Scattering
- Crystallization of Amorphous Silicon Layers RF-Sputtered on Sapphire by CW Ion Laser Annealing
- Brillouin Scattering in CdIn_2S_4 Crystal:Determination of Elastic Constants and Photoelastic Constants
- Coexistence of Surface and Bulk Acoustic Waves in Acoustoelectric Domains in Semiconducting CdS
- Infrared Study of Surface Phonon Modes in ZnO Small Crystals
- Transverse Electric Current Effect on Surface Acoustin Wave Propagation on Photoconductive CdS
- Optical Absorption for Acoustic Flux in Semiconductive CdS Single Crystal
- A case of aneurysmal rupture at the vertebral artery 14 days after whiplash injury : was it traumatic or non-traumatic?
- Antipruritic Effects of the Supercritical Fluid Extract from Cnidii monnieri fructus (dried fruits of Cnidium monnieri CUSSON) in Mice
- Stressor-like effects of cocaine on heat shock protein and stress-activated protein kinase expression in the rat hippocampus : interaction with ethanol and anti-toxicity drugs
- Chara Myosin and the Energy of Cytoplasmic Streaming
- Evidence for widespread infection of hepatitis E virus among wild rats in Japan
- ベトナムにおける成因不明急性および劇症肝炎小児患者からのA型肝炎ウイルス(HAV)RNAの検出 : HAVベトナム株ゲノムの特徴
- Brain Excitatory Amino Acid Transporters (EAATs) and Treatment of Methamphetamine Toxicity
- Increased Immunoreactivity of POMC-Derived Neuropeptides and Immediate-Early Gene-Derived Proteins (c-Fos and Egr-1 Proteins) as an Early Step of Acute Cocaine-Induced Stressor Effects : Comparison with the Effects of Immobilization Stress
- Protective Effects of Cannabinoid Receptor Ligands Analogous to Anandamide against Cocaine Toxicity
- Stress-Related Behavioral Alterations Accompanying Cocaine Toxicity: The Effects of Mixed Opioid Drugs
- Effect of Methamphetamine on Male Mice Fertility
- ROLE OF COCAETHYLENE IN TOXIC SYMPTOMS DUE TO REPEATED SUBCUTANEOUS COCAINE ADMINISTRATION MODIFIED BY ORAL DOSES OF ETHANOL
- PROTECTIVE EFFECTS OF BUPRENORPHINE AGAINST AMPLIFIED COCAINE AND ETHANOL LETHALITY IN MICE: ROLE OF COCAETHYLENE
- Simian TT virus (s-TTV) infection in patients with liver diseases
- Susceptibility of Chara Myosin to SH Reagents
- Nitrogen Doping in GaP Microcrystals : A Photoluminescence Study
- Raman Study of Crystal Structure of Gas-Evaporated MoO_3 Microcrystals
- First-Principles Study of C_6M_2 (M = B, Al, Mg, Li), C_7B and Related Compounds
- Electronic and Lattice Properties of MgB_2 and Related Phases under Various Compression Conditions
- Jetlike Structures in the Visible Emission of Plasma Pumped by an Obliquely Incident Picosecond Laser(Condensed Matter : Electronic Structure, Electrical, Magnetic and Optical Properties)
- Longitudinal-Pumping and Transient Collisional Excitation of High Performance Ni-Like Soft-X-Ray Lasers
- Photoluminescence from Si1-xGex alloy nanocrystals
- Size-dependent near-infrared photoluminescence from Ge nanocrystals embedded in SiO2 matrices
- Existence and Significance of 'Soft Worms'in Isotropic Turbulence*
- Collisionless Damping of Perpendicular Magnetosonic Waves in a Two-Ion-Spacies Plasma
- Trinomial Generalized Cantor Set Model for Isotropic Turbulence
- Photoluminescence of Si-Rich SiO_2 Films : Si Clusters as Luminescent Centers
- Monte Carlo Studies of the Square Lattice Ising System with the Two-Dimensional Dipolar Interaction
- Raman Scattering from Acoustic Phonons Confined in Microcrystals : Small Gold and Silver Particles Embedded in SiO_2 Thin Films
- The Uniaxial Dipoles on the Square Lattice with the Two-Dimensional Dipolar Interaction
- In Situ Infrared Study of Surface Oxide Formation on Gas-Evaporated Si Microcrystals
- Effects of Microinjected Carbachol on the Antinociceptive Response to Noxious Heat Stimuli
- The Annealing Behavior of Si-F Bonding Structure of Amorphous Si-F Films
- The Motility of Chara corallina Myosin was Inhibited Reversibly by 2, 3-Butanedione Monoxime (BDM)
- Growth of Ge Microcrystals in SiO_2 Thin Film Matrices : A Raman and Electron Microscopic Study
- Current Instability and Chaos Induced during Low-Temperature Avalanche Breakdown In n-GaAs under Longitudinal Magnetic Field
- Quantum Size Effects in Ge Microcrystals Embedded in SiO_2 Thin Films
- Implications of Broad Raman Spectra of Sputtered SiGe Alloy Films : Condensed Matter
- Chaotic Behavior of a Driven Current Filament Observed in High-Purity n-GaAs at 4.2 K
- Thermal Annealing of Gas-Evaporated Ge Microcrystals:A Raman and Electron Microscopic Study
- Incipient Crystallization of Evaporated Germanium Film Probed by Raman Scattering
- Raman Study of Silicon Small Particles
- Probing the Crystallinity of Evaporated Silicon Films by Raman Scattering
- Raman Study of Thermal- and Laser-Annealed Silicon Small Particle : Physical Acoustics
- Modulation of noradrenergic and serotonergic transmission by noxious stimuli and intrathecal morphine differs in the dorsal raphe nucleus of anesthetized rat : in vivo voltammetric studies
- TRITIUM CONTENT IN JAPANESE BODIES
- Hepatitis B and C virus infection and p53 mutations in human hepatocellular carcinoma in Harbin, Heilongjian Province, China
- Synthesis and Neurotoxicity of Tetrahydroisoquinoline Derivatives for Studying Parkinson's Disease
- Lattice Vibrations in CdGa_2S_4 : Physical Acoustics
- Photoacoustic Spectra in Ternary Semiconducting Compound CdIn_2S_4 : Photo-Acoustic Spectroscopy
- IL-2-regulated persistent human herpesvirus-6B infection facilitates growth of adult T cell leukemia cells
- 3'-Fluorine-Substitution in 3'-Fluorocarbocyclic Oxetanocin A Augments the Drug's Inhibition of HHV-6B Propagation in Chronically Infected Cultures
- Efficient Propagation of Human Herpesvirus 6B in a T-Cell Line Derived from a Patient with Adult T-Cell Leukemia/Lymphoma
- Optical Surface Phonon Modes in ZnO Small Crystals
- Calculationa of the Far-Infrared Anharmonic Optical Properties of CsCl at 300 and 80 K
- Far-Infrared Reflection Spectra of CsCl Single Crystals
- Lattice Vibrations in Spinel-Type CdIn_2S_4
- Lattice Vibrations in CdIn_2S_4
- Pre-S2 deletion mutants of hepatitis B virus could have an important role in hepatocarcinogenesis in Asian children
- Present state of hepatitis E virus epidemiology in Tokyo, Japan
- Analysis of Matrix Protein Components of the Dermis-Like Structure Formed in a Long-Term Culture of Human Fibroblasts: Type VI Collagen Is a Major Component^1
- Epidemiology of SEN virus infection among patients with hepatitis B and C in China
- Prevalence of hepatitis virus types B through E and genotypic distribution of HBV and HCV in Ho Chi Minh City, Vietnam
- Prevalence of hepatitis G virus infection among patients with liver diseases in Japan
- Efficient Substructure Discovery from Large Semi-Structured Data(Data Mining)
- A Device Modeling of Amorphous Silicon Based Tandem Solar Cells
- Effects of Ca^ and Calmodulin on the Motile Activity of Characean Myosin In vitro
- Intercellular Transport of Macromolecules in Nitella
- Binding of Chara Myosin Globular Tail Domain to Phospholipid Vesicles
- Cloning and Characterization of a Myosin from Characean Alga, the Fastest Motor Protein in the World
- Enharncement of Photoelectric Conversion Efficiency in Copper Phthalocyanine Solar Cell by Surface Plasmon Excitation
- Further study of hepatitis C virus RNA detection in formalin-fixed, paraffin-embedded liver tissues by ligation-dependent polymerase chain reaction
- Biweekly therapy for non-small cell lung cancer using cisplatin, paclitaxel and gemcitabine
- Molecular cloning of full-length sequence of hepatitis G virus genome isolated from a Japenese patient with liver disease
- Geographical characterization of hepatitis G virus genome: Evidence for HGV genotypes based on phylogenetic analysis
- Prevalence of hepatitis G virus and characterization of viral genome in Ghana^1
- Surface Tensions of Basic NaCl-AlCl3 and LiCl-AlCl3 Binary Melts (特集 New Trends in Molten Salt Chemistry and Electrochemistry)
- Pseudo-Line-Shaped Temperature Distribution Produced by Two-Dimensional Scanning with a Circular Gaussian Electron Beam