Raman Microprobe Study on Relaxation of Residual Stresses in Patterned Silicon-on-Sapphire

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1984-06-20

著者

• ABE Kenji

  Department of Biochemistry 1, Hamamatsu University School of Medicine

• Yamamoto Keiichi

  Department Of Electronics Faculty Of Engineering Kobe University

• Abe Kohji

  Department Of Materials Science Faculty Of Science Hiroshima University

• Yamamoto K

  Kyushu Univ. Fukuoka Jpn

• Amako Katsuya

  National Laboratory for High Energy Physics KEK

• Yamamoto K

  Ntt Basic Res. Lab. Atsugi Jpn

• Abe K

  Department Of Applied Physics And Chemistry University Of Electro-communications

• YAMADA Masayoshi

  Department of Electronics,Faculty of Engineering,Kobe University

• YAMAZAKI Ken-ichi

  Division of Science of Materials, The Graduate School of Science and Technology

• UOTANI Ricardo

  Department of Electronics, Faculty of Engineering, Kobe University

• NAMBU Katsumi

  Department of Electronics, Faculty of Engineering, Kobe University

• Abe K

  Department Of Materials Science And Engineering Waseda University

• Abe Kenji

  Department Of Electronic Engineering Faculty Of Engineering Kobe University

• Yamamoto K

  Harima Institute Riken (the Institute Of Physical And Chemical Research):graduate School Of Engineer

• Nambu Katsumi

  Department Of Electronics Faculty Of Engineering Kobe University

• Uotani Ricardo

  Department Of Electronics Faculty Of Engineering Kobe University

• Yamada Masayoshi

  Department Of Electronics Faculty Of Engineering Osaka University

• Yamamoto Keiichi

  Department Of Biology Chiba University

• Abe Kenji

  Department Of Biochemistry 1 Hamamatsu University School Of Medicine

• Yamada Masayoshi

  Department Of Electronics And Information Science Faculty Of Engineering And Design Kyoto Institute

• YAMAMOTO Keiichi

  Department of Bioengineering, Faculty of Engineering, Soka University

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