Growing Mechanism of Thin Polymer Films by the Glow Discharge-Indirect Method
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概要
- 論文の詳細を見る
The growth rate of thin polymer film polymerized on a substrate placed in the glow discharge of organic vapor (the glow discharge-indirect method) is calculated theoretically assuming that the polymerization of monomers is initiated by positive ions colliding with the monolayer on the substrate. The three transport processes of positive ions flowing into the substrate are taken into consideration: (1) the ambipolar diffusion, (2) the recombination of the charges forming the ion sheath at each half cycle, and (3) the enhanced charge transport by the effect of stray capacity which is effective when the metal film is deposited on the substrate. The theoretical results are compared with the experimental ones on the film formed in styrene monomer of about 1 Torr at a few kHz and a few mA/cm^2. A qualitative agreement between them has been obtained.
- 社団法人応用物理学会の論文
- 1975-10-05
著者
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MORITA Shinzo
Department of Electrical and Electronic Engineering and Information Engineering, Nagoya University
-
Sawa Goro
Department Of Electrical And Electronic Engineering Mie University
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Sawa Goro
Department Of Electrical Engineering Nagoya University
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Ieda Masayuki
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
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