Q-Mass Study on C-Au-S Film Formation by Co-operation Process of Plasma CVD and Sputtering
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概要
- 論文の詳細を見る
A new carbon gold sulfide (C-Au-S) film was formed by co-operation process of plasma CVD of CH_4, SF_6 and Ar mixture gas and sputtering of gold. X-ray diffraction spectra of C-Au-S film and chemical shift of C, Au and S atom shows that the gold atom in the film is atomically distributed and chemically bonded with sulfur and carbon. The refractive index of the C-Au-S film was measured to be 2.5〜3.3, however this value was apparently small compared to the expected value from the electronic polarizability and the atomic composition of C, Au and S. Because of this kind of inconsistent result, it was supposed that the film contains conductive C-Au-S granular molecules. Quadrupole mass (Q-Mass) spectra during co-operation process of plasma CVD and sputtering were measured to study carbon gold sulfide (C-Au-S) film deposition kinetics. Unexpectedly C-Au-S molecule was detected, this fact confirmed that HF dissociation from the source mixture gas and C-Au-S molecule formation is important reaction for C-Au-S film formation.
- 一般社団法人電子情報通信学会の論文
- 2004-01-13
著者
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MORITA Shinzo
Department of Electrical and Electronic Engineering and Information Engineering, Nagoya University
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Kashem Md.
Department Of Electronics Graduate School Of Engineering Nagoya University
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Kashem Abul
Department Of Electronics Graduate School Of Engineering Nagoya University
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Kashem Md.
Department of Electronics, Graduate School of Engineering, Nagoya University
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