C-13-1 C-S compound thin film formed by RF plasma CVD with using CH_4, SF_6 and H_2 mixture gas
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人電子情報通信学会の論文
- 2000-09-07
著者
-
Matsushita Masaki
Meinan Technical High School
-
MORITA Shinzo
Department of Electrical and Electronic Engineering and Information Engineering, Nagoya University
-
Kasahem Abul
Department of Electronics, Nagoya University
-
Kasahem Abul
Department Of Electronics Nagoya University
-
Morita Shinzo
Department Of Electronics Nagoya University
関連論文
- 50 nm Pattern Etching of Si Wafer by Synchrotron Radiation Excited CF_4 Plasma
- Electron Spin Resonance in Thin Polymer Films Formed in a Glow Discharge
- C-S Thin Films Formed by Plasma CVD (Special Issue on Organic Molecular Electronics for the 21st Century)
- Carbon Gold Sulfide Synthesized by Cooperation Process of Plasma Chemical Vapor Deposition (CVD) and Sputtering
- C-Si-O(B) Thin Film-A Possible X-Ray Mask Substrate Candidate
- Bubbles Formed by Plasma Polymerization of MMA in a Tail Flame of SF_6-Ar-MMA Mixture Discharge
- Electron Beam Vacuum Lithography Using a Plasma Co-Polymerized MMA-TMT Resist
- C-13-1 C-S compound thin film formed by RF plasma CVD with using CH_4, SF_6 and H_2 mixture gas
- C-13-6 Ablation of Polyimide Interface Film by the Transmitting Electron Beam
- SC-7-1 Formation and Characterization of C-Au-S Granular Molecules
- C-Au Film Formed by Co-operation Process of Methane Plasma CVD and Sputtering of Gold(Special Issue on Recent Progress in Organic Molecular Electronics)
- Q-Mass Study on C-Au-S Film Formation by Co-operation Process of Plasma CVD and Sputtering
- 670 nm Laser Light Propagation Characteristics of 10-1μmφ Polystyrene Microsphere Array ; Optics and Quantum Electronics
- PVDF Electron Emitter by Reversed Polarization Method(Evaluation Methods and Characterization of Organic Materials)(Recent Progress in Organic Molecular Electronics)
- Q-Mass Study on C-Au-S Film Formation by Co-operation Process of Plasma CVD and Sputtering
- Electron Emission from Polyvinylidenefluoride Ferroelectric Substance by Polarization Inversion
- AFM/STM Observation of C-Au-S Conductive Granular Molecule by Co-operation Process of Plasma CVD and Sputtering(Organic-neuro Systems)(Recent Progress of Organic Molecular Electronics)
- Growing Mechanism of Thin Polymer Films by the Glow Discharge-Indirect Method