AFM/STM Observation of C-Au-S Conductive Granular Molecule by Co-operation Process of Plasma CVD and Sputtering(Organic-neuro Systems)(<Special Section>Recent Progress of Organic Molecular Electronics)
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概要
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AFM/STM observations were performed on sub nm thick C-Au-S film by co-operation process of plasma CVD and sputtering with using CH_4, SF_6 and Ar mixture gas and Au plate discharge electrode. From the refractive index values, the conductive granular molecules with a size of 0.4-0.6nm were expected to exist in the film. For the film at thickness similar to the molecular size, Ra (arithmetic mean departures of roughness profile from the mean line) values were measured to be 0.712/6.10 nm by AFM/STM measurement, respectively. The one order large STM Ra value compared to the AFM Ra value suggests that the film contains conductive granular molecules.
- 一般社団法人電子情報通信学会の論文
- 2004-02-01
著者
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MORITA Shinzo
Department of Electrical and Electronic Engineering and Information Engineering, Nagoya University
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Kashem Md.
Department Of Electronics Graduate School Of Engineering Nagoya University
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Suzuki Mikinori
Department of Electrical, Electronics and Information Engineering, Nagoya University
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Suzuki Mikinori
Department Of Electronics Graduate School Of Engineering Nagoya University
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