Variation of Ion Current Flowing into Double Probes with Coating of Organic Thin Film in rf Discharge Plasma
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概要
- 論文の詳細を見る
The current-voltage(I_d-V_d) characteristics of double probes coated with an ethylene plasma polymerized(PPE) film were investigated in ethylene and nitrogen plasma produced by rf discharges. Since the probes were coated, the I_d-V_d curve exhibited a hysteresis and the ion current was observed to decrease. On the basis of the shape of the hysteresis in the saturation region, we found a way to clarify whether the observed ion current was real or not. As a result, we could confirm that the coating of probes actually causes a decrease in the ion current ?I_p. Furthermore, a comparison between coated probes and a clean metal probe furnished with an external C-R parallel circuit has revealed that the decrease in ?I_p arises from the direct contact of plasma with the PPE film, indicating that the ion current from plasma into dielectrics is smaller than that into metal.
- 社団法人応用物理学会の論文
- 1987-05-20
著者
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IEDA Masayuki
Department of Electronics, Aichi Institute of Technology
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SAWA Goro
Department of Electronics, Mie University
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YAMAGUCHI Shinji
Department of Molecular Pathology, Faculty of Pharmaceutical Sciences, Teikyo University
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Yamaguchi Shinji
Department Of Electrical Engineering Suzuka Technical College
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Sawa G
Department Of Electronics Mie University
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Sawa Goro
Department Of Electrical And Electronic Engineering Mie University
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Ieda M
Department Of Electronics Aichi Institute Of Technology
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Ieda Masayuki
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
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Ieda M
Department Of Electrical Engineering Nagoya University
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Yamaguchi Shinji
Department Of Earth Sciences And Technology Akita University
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Yamaguchi Shinji
Department Of Earth Science And Technology Faculty Of Engineering And Reosurce Science Akita Univers
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