A New Method for Estimating the Voltage-Current Characteristics in a Plasma-Dielectric-Metal System
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概要
- 論文の詳細を見る
A new method was proposed for estimating the voltage-current characteristics of dielectric film sandwiched between plasma and metal electrodes. An experimental technique for obtaining these characteristics was then established using the probe characteristics which were measured by a single probe covered with plasma polymerized film in nitrogen gas plasma.
- 社団法人応用物理学会の論文
- 1982-10-20
著者
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IEDA Masayuki
Department of Electronics, Aichi Institute of Technology
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SAWA Goro
Department of Electronics, Mie University
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YAMAGUCHI Shinji
Department of Molecular Pathology, Faculty of Pharmaceutical Sciences, Teikyo University
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Yamaguchi Shinji
Department Of Electrical Engineering Suzuka Technical College
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Sawa G
Department Of Electronics Mie University
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Sawa Goro
Department Of Electrical And Electronic Engineering Mie University
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Ieda M
Department Of Electronics Aichi Institute Of Technology
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Ieda Masayuki
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
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Yamaguchi Shinji
Department Of Earth Sciences And Technology Akita University
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Yamaguchi Shinji
Department Of Earth Science And Technology Faculty Of Engineering And Reosurce Science Akita Univers
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