High Responsivity, Low Dark Current, and Highly Reliable Operation of InGaAIAs Waveguide Photodiodes for Optical Hybrid Integration (Special Issue On Devices, Packaging Technology, and Subsystems for the Optical Access Network)

概要

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We propose an InGaAIAs waveguide p-i-n photodiode (WG-PD) with a thick symmetric double-core for surface-hybrid integration onto optical platforms, which can be applied to low cost optical modules for access networks. The waveguide structure is designed to efficiently couple to flat-ended single mode fibers while maintaining low-voltage (less than 2V) operation. Crystal growth conditions and a passivation technique are also investigated for obtaining high responsivity, low dark current and highly reliable operation. Fiber-coupled responsivity as high as 0.95A/W, at a 1.3-μm wavelength, and vertical coupling tolerance as wide as ±2.6μm are demonstrated for a dispersion-shifted fiber (DSF) coupling at an operating voltage of 2V. Dark current is as low as 300pA at 25℃ and 12nA at 100℃. A temperature accelerated aging test is performed to show the feasibility of using the WG-PD in long-term practical applications.
社団法人電子情報通信学会の論文
1997-01-25