Tunable External-Cavity Quantum-Well Laser Using Grating Coupler Integrated in Selectively Disordered Waveguide(Special Issue on Recent Progress in Semiconductor Lasers and Light-Emitting Devices)

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A tunable external-cavity InGaAs/AlGaAs quantum-well laser using a grating coupler monolithically integrated in a selectively disordered waveguide is demonstrated. The laser consists of an amplifier with a narrow channel tor lateral single-mode guiding and a tapered section, a grating coupler for output beam collimation and wavelength dispersion, and an external half mirror. Selective quantum-well disordering technique using SiO_2 caps of different thicknesses and rapid thermal annealing was employed to reduce the passive waveguide loss in the grating coupler region. Loss reduction from 〜40cm^<-1> to 3cm^<-1> was accomplished. Resultant increase of the grating coupler efficiency and expansion of the effective aperture length led to significanf improvement of the laser performances. The maximum output power of 105mW and wide tuning range of 21.1nm centered at 997nm were obtained. The well collimated output beam of full diffraction angles at half maximum of 0.16°×0.18°was obtained.
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2002-01-01