TiNi形状記憶合金薄膜アクチュエータの動作特性の検討

概要

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In this paper, the operating characteristics of thin TiNi shape memory alloy films are analyzed theoretically and a microactuator with one degree of freedom driven by two thin TiNi shape memory alloy films is designed and produced by way of trial. It is proved that the driving force of a microactuator made by TiNi shape memory alloy is caused by the bending moment generated from a shape memorized part of a thin TiNi film. And, it is found that the actuating velocity of thin TiNi films is reduced transitionally, and is under the influence of the velocity of temperature rise from As (start temperature of austenite transformation) to Af(finish temperature of austenite transformation). Furthermore, it is proved that the operating characteristics of microactuator can be designed based on the analyzing method shown by this report.
社団法人精密工学会の論文
2000-09-05