微細電気化学エッチングにおけるメディエータ輸送過程とエッチング形状の関係

概要

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In this research, a transportation phenomenon of the mediator and the reaction mechanism of etching on the electrochemical etching by using mediator are clarified. Driving force for the transportation of the mediator is under the control of concentration gradient according to the diffusion. Because the electric potential in a location over 10nm from an electrode is small that it may be disregarded and the current density is proportional to an inverse number of the square root of a time. An etching shape is decided by the location with the constant equilibrium oxidizer. This conclusion was derived by the following experimental results. The current in etching process is decreasing with time and gradually approaching the equilibrium value. As the distance from an electrode to a specimen becomes smaller, the diameter of an etching region becomes larger. A cylindrical etched shape is gotten in etching process by using a cylindrical shaped electrode.
社団法人精密工学会の論文
2000-12-05