超磁歪アクチュエータに関する研究 : 大出力・超精密位置決め装置の開発

概要

論文の詳細を見る
This research aims at developing a large power, ultra precision positioning system by using giant magnetostriction materials. The giant magnetostriction materials have the features that large power and large displacement can be obtained as compared with electrostriction PZT, but on the other hand, the control of the thermal deformation due to the generation of Joule's heat became a problem. In this study, in order to realize the ultra precision positioning with nm errors, a temperature controller within 10 m℃ was developed, and an ultra precision positioning device equipped with it was manufactured for trial. The results obtained were as follows. (1) By adding the device which can control temperature to the variation within 10 m℃ to a giant precision positioning system, the system which can do the positioning with nm errors was able to be developed. (2) As compared with the positioning by electrostriction PZT, by the giant magnetostriction having the features of large power and large displacement, ultra precision positioning became feasible. (3) The giant magnetostriction positioning system, in which the hysteresis is small in high load condition and which has the displacement efficiency of about 90%, was able to be developed.
社団法人精密工学会の論文
1991-03-05