超磁歪アクチュエータに関する研究(第1報) : 超磁歪材料RFey(R=Tb, Dy)のアクチュエータとしての性能

概要

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Intermetallic compounds with the cubic laves phase structure of the type RFey (R=Tb. Dy) are well known to possess a large magnetostriction above O. 1%, and it has been pointed out that this type of compound may make it possible to provide increased precision and control over micropositioning device for high forces to position heavy objects, the accurate and fine focus laser mirrors, telescopes, and electronic microscope. In this study, the design and displacement characteristics for prototype giant magnetostriction actuator with ultra precision are presented. As the preliminary test results, it is certified that use of giant magnetostriction in actuators makes it possible to realize the high power stepping drive with ultra fine resolution of nano meter class, which is very hopeful micro movement tool post.
社団法人精密工学会の論文
1990-02-05