Deep Trench Etching for Chip-to-Chip Three-Dimensional Integration

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概要

• 論文の詳細を見る
• 2005-09-13

著者

• FUKUSHIMA Takafumi

  Dept. Bioengineering and Robotics, Tohoku University

• KOYANAGI Mitsumasa

  Dept. Bioengineering and Robotics, Tohoku University

• Yamada Yusuke

  Dept. Of Bioengineering And Robotics Graduate School Of Engineering Tohoku University

• Koyanagi Mitsumasa

  Cir Tohoku University

• Fukushima Takafumi

  Dept. Of Bioengineering And Robotics Graduate School Of Engineering Tohoku University

• KIKUCHI Hirokazu

  Dept. of Bioengineering and Robotics, Graduate School of Engineering, Tohoku University

• KIJIMA Hitoshi

  Dept. of Bioengineering and Robotics, Tohoku Univ.

• Koyanagi Mitsumasa

  Dept. Of Bioengineering And Robotics Graduate School Of Engineering Tohoku University

• Kijima Hitoshi

  Dept. Of Bioengineering And Robotics Tohoku Univ.

• Kikuchi Hirokazu

  Dept. Of Bioengineering And Robotics Graduate School Of Engineering Tohoku University

• Fukushima Takafumi

  Department Of Bioengineering And Robotics Graduate School Of Engineering Tohoku University

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