Evaluation of Dislocation Density of SiGe-on-Insulator Substrates using Enhanced Secco Etching Method
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-07-15
著者
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Usuda Koji
Mirai-aset
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Mizuno Tomohisa
Mirai-aist
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Takagi S
Mirai-national Institute Of Advanced Industrial Science And Technology (aist)
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MORIYAMA Yoshihiko
MIRAI-Association of Super-Advanced Electronics Technology (ASET)
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SUGIYAMA Naoharu
MIRAI-Association of Super-Advanced Electronics Technology (ASET)
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TEZUKA Tsutomu
MIRAI(ASET)
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NAHAKARA Shu
MIRAI Project, Association of Super-Advanced Electronics Technology (ASET)
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TAKAGI Sin-ichi
MIRAI Project, Association of Super-Advanced Electronics Technology (ASET)
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Nahakara Shu
Mirai-association Of Super-advanced Electronics Technology (aset)
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Sugiyama N
Mirai-association Of Super-advanced Electronics Technology (aset)
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