Strained-Si-on-Insulator (Strained-SOI) MOSFETs-Concept, Structures and Device Characteristics
スポンサーリンク
概要
- 論文の詳細を見る
An effective way to realize scaled CMOS with both requirements of high current drive and low supply voltage is to introduce high mobility channel such as strained Si. This paper proposes a new device structure using the strained-Si channel, strained-Si-on-Insulator (strained-SOI) MOSFET, applicable to sub-100 nm Si CMOS technology nodes. The device structure and the advantages of strained-SOI MOSFETs are presented. It is demonstrated that strained-SOI MOSFETs are successfully fabricated by combining SIMOX technology with re-growth of strained Si and that n-and p-MOSFETs have mobility of 1.6 and 1.3 times higher than the universal one, respectively. Furthermore, it is also shown that ultra-thin SiGe-on-Insulator (SGOI) virtual substrates with higher Ge content, necessary to further increase mobility and to realize fully-depleted SOI MOSFETs, can be made by oxidation of SGOI structure with lower Ge content.
- 社団法人電子情報通信学会の論文
- 2001-08-01
著者
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Takagi S
Mirai-national Institute Of Advanced Industrial Science And Technology (aist)
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KUROBE Atsushi
Advanced LSI Technology Laboratory, Toshiba Corporation
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TAKAGI Shin-ichi
The authors are with Advanced LSI Technology Laboratory, Corporate Research & Development Center, To
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MIZUNO Tomohisa
The authors are with Advanced LSI Technology Laboratory, Corporate Research & Development Center, To
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SUGIYAMA Naoharu
The authors are with Advanced LSI Technology Laboratory, Corporate Research & Development Center, To
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TEZUKA Tsutomu
The authors are with Advanced LSI Technology Laboratory, Corporate Research & Development Center, To
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KUROBE Atsushi
The authors are with Advanced LSI Technology Laboratory, Corporate Research & Development Center, To
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Sugiyama N
Mirai-association Of Super-advanced Electronics Technology (aset)
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Sugiyama N
Research And Development Center Toshiba Corporation
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Kurobe Atsushi
Advanced Lsi Technology Laboratory Toshiba Corporation
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Tezuka T
Mirai-aset
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Mizuno T
Nippon Leiz Co. Ltd. Tama‐shi Jpn
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