Evaluation of Dislocation Density of SiGe-on-Insulator Substrates using Enhanced Secco Etching Method
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概要
- 論文の詳細を見る
The dislocation density in thin SiGe on Insulator layers is evaluated, for the first time, by the enhanced secco etching method. It is found that the dislocation density in SGOI layers formed by the Ge condensation method is $6\times 10^{3}$ cm-2. It has also been confirmed that the different types of defects are observed by the HF defect detection method. In addition, the origin of dislocations is discussed by the diagnosis of the variation of dislocation densities during the process steps in the Ge condensation technique.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-07-15
著者
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MORIYAMA Yoshihiko
MIRAI-Association of Super-Advanced Electronics Technology (ASET)
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NAKAHARAI Shu
MIRAI-Association of Super-Advanced Electronics Technology (ASET)
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TAKAGI Sin-ichi
MIRAI Project, Association of Super-Advanced Electronics Technology (ASET)
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Mizuno Tomohisa
MIRAI Project, Association of Super-Advanced Electronics Technology (ASET), 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan
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Sugiyama Naoharu
MIRAI Project, Association of Super-Advanced Electronics Technology (ASET), 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan
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Tezuka Tsutomu
MIRAI Project, Association of Super-Advanced Electronics Technology (ASET), 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan
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Usuda Koji
MIRAI Project, Association of Super-Advanced Electronics Technology (ASET), 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan
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Moriyama Yoshihiko
MIRAI Project, Association of Super-Advanced Electronics Technology (ASET), 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan
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Takagi Sin-ichi
MIRAI Project, Association of Super-Advanced Electronics Technology (ASET), 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan
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Nakaharai Shu
MIRAI Project, Association of Super-Advanced Electronics Technology (ASET), 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan
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