Device Design of High-Speed Source-Heterojunction-MOS-Transistors (SHOT) under 10-nm Regime
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概要
- 論文の詳細を見る
- 2005-09-13
著者
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Mizuno Tomohisa
Mirai-aist
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TAKAGI Shinichi
MIRAI, Advanced Semiconductor Research Center - National Institute of Advanced Industrial Science an
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Takagi Shinichi
Mirai-aist
関連論文
- Evaluation of Dislocation Density of SiGe-on-Insulator Substrates using Enhanced Secco Etching Method
- Fabrication of HfO_xN_y dielectrics on Ge from HfN_x deposition
- Device Design of High-Speed Source-Heterojunction-MOS-Transistors (SHOT) under 10-nm Regime