Amorphous Indium Gallium Zinc Oxide Thin-Film Transistors with a Low-Temperature Polymeric Gate Dielectric on a Flexible Substrate

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概要

• 論文の詳細を見る

• Amorphous indium gallium zinc oxide (a-IGZO) thin-film transistors (TFTs) with a solution-processed polymeric gate dielectric of cross-linked poly(4-vinylphenol) (c-PVP) film were fabricated on a poly(ethylene terephthalate) (PET) substrate on which an a-IGZO film, as the active channel layer, was deposited by radio frequency (RF) sputtering. The entire TFT fabrication process was carried out at a temperature below 110 °C. The device exhibited an on/off ratio of 1.5\times 10^{6} and a high field-effect mobility of 10.2 cm²V^-1s^-1, which is, to our knowledge, the best result ever achieved among a-IGZO TFTs with polymeric gate dielectrics on a plastic substrate.

• 2013-07-25

著者

• Kim Young

  Department Of Agricultural Chemistry The University Of Tokyo

• Kwon Sang

  Department Of Chemistry Yeungnam University

• Kim Woo

  Department Of Biology College Of Science Yonsei University

• Lee Ho

  Department Of Chemistry Stanford University

• Park Jaehoon

  Department of Electrical, Information and Control Engineering, Hongik University, 72-1 Sangsu-dong, Mapo-gu, Seoul 121-791, Korea

• Hyung Gun

  Department of Materials Science and Engineering, Hongik University, Seoul 121-791, Korea

• Wang Jian-Xun

  Department of Electronics Engineering, Gachon University, Seongnam, Gyeonggi 416-701, Korea

• Li Zhao-Hui

  Department of Electronics Engineering, Gachon University, Seongnam, Gyeonggi 416-701, Korea

• Koo Ja-Ryong

  Department of Information Display, Hongik University, Seoul 121-791, Korea

• Cho Eou-Sik

  Department of Electronics Engineering, Gachon University, Seongnam, Gyeonggi 416-701, Korea

• Lee Ho

  Department of Information Display, Hongik University, Seoul 121-791, Korea

• Kim Woo

  Department of Green Energy and Semiconductor Engineering, Hoseo University, Asan, Chungnam 336-795, Korea

• Kwon Sang

  Department of Electronics Engineering, Gachon University, Seongnam, Gyeonggi 416-701, Korea

• Hyung Gun

  Department of Information Display, Hongik University, Seoul 121-791, Korea

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