Athermal Wavelength Characteristics of Si Slot Ring Resonator Embedded with Benzocyclobutene for Optoelectronic Integrated Circuits
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概要
- 論文の詳細を見る
An athermal Si-slot-waveguide ring resonator embedded with benzocyclobutene (BCB), a low-$k$ material used in electronics, was proposed. By controlling the width of the BCB-filled gap to 90 nm, the temperature coefficient of equivalent index of a Si slot waveguide could be reduced to $3.70\times 10^{-6}$, which is two orders of magnitude smaller than that of a conventional Si waveguide. The dependences of peak wavelength shift on temperature in the fabricated devices of a conventional Si wire waveguide with SiO2 cladding, Si wire waveguide with BCB cladding, and Si slot waveguide with BCB cladding were 26, 17, and $-0.6$ pm/K, respectively.
- 2010-05-25
著者
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Inoue Keita
Department Of Computer Science School Of Electrical And Computer Engineering National Defense Agency
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Nobuhiko Nishiyama
Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meguro, Tokyo 152-8552, Japan
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Atsumi Yuki
Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meguro, Tokyo 152-8552, Japan
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Shigehisa Arai
Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meguro, Tokyo 152-8552, Japan
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NISHIYAMA Nobuhiko
Department of Electrical and Electronic Engineering, Tokyo Institute of Technology
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Keita Inoue
Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meguro, Tokyo 152-8552, Japan
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