Soft X-ray Microscope Constructed with 130-nm Spatial Resolution Using a High Harmonic X-ray Source
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概要
- 論文の詳細を見る
Using high harmonic radiation as an X-ray light source, a soft X-ray microscope with nanometer-scale spatial resolution was investigated. A transmission soft X-ray microscope was constructed using a Mo/Si multilayer concave mirror as a condenser and a Fresnel zone plate as a microscope objective. The high-order harmonic source at 13 nm, emitted from neon atoms driven by intense femtosecond laser pulses, was optimized by controlling laser chirp. Objects, patterned on 160-nm-thick hydrogen silsesquioxane coated on a 100-nm-thick Si3N4 membrane, were used for imaging. The analysis of object images, captured on an X-ray charge-coupled device, showed that the spatial resolution of the microscope was about 130 nm, verifying the usefulness of the tabletop soft X-ray source.
- 2009-02-25
著者
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KIM Deuk
Department of Semiconductor Science, Dongguk University
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Lee Kyoung
Department Of Biochemistry College Of Medicine And Applied Radiological Science Research Institute C
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Nam Chang
Department Of Cardiology Keimyung University Dongsan Medical Center
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Park Jong
Department Mathematics Pusan National University
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Park Jong
Department of Physics and Coherent X-ray Research Center (CXRC), Korea Advanced Institute of Science and Technology (KAIST), Daejeon 305-701, Korea
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Lee Kyoung
Department of Physics and Coherent X-ray Research Center (CXRC), Korea Advanced Institute of Science and Technology (KAIST), Daejeon 305-701, Korea
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Park Juyun
Department of Physics and Coherent X-ray Research Center (CXRC), Korea Advanced Institute of Science and Technology (KAIST), Daejeon 305-701, Korea
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Nam Chang
Department of Physics and Coherent X-ray Research Center (CXRC), Korea Advanced Institute of Science and Technology (KAIST), Daejeon 305-701, Korea
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Kim Deuk
Department of Physics and Coherent X-ray Research Center (CXRC), Korea Advanced Institute of Science and Technology (KAIST), Daejeon 305-701, Korea
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