Dependence of Structural and Electrical Properties on Substrate Temperature for Annealed C54 TiSi_2 Thin Films Grown on p-Si Substrates

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2003-10-15

著者

• Kim T

  Hanyang Univ. Seoul Kor

• KIM Tae

  Advanced Semiconductor Research Center, Division of Electrical and Computer Engineering, Hanyang Uni

• LEE Sejoon

  Department of Semiconductor Science, Dongguk University

• KIM Deuk

  Department of Semiconductor Science, Dongguk University

• Kim Deuk

  Quantum-functional Semiconductor Research Center Dongguk University

• Kang T

  Dongguk Univ. Seoul Kor

• Lee S

  National Univ. Singapore Singapore

• Lee S

  Quantum-functional Semiconductor Research Center Dongguk University

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