Modeling of Spin Coating Film Transfer and Hot Pressing Method in the New LSI Fabrication Process I — the Film Transfer Process —
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概要
- 論文の詳細を見る
In this paper, we describe the dynamics of the filling of spaces between interconnections with a polymeric liquid attached to a rigid plate via an elastic film when the rigid plate is pressed down at a constant velocity. A set of model equations which can describe the filling process is proposed. By performing simulations for typical interconnection configurations, it was found that the time required to a achieve the total planarization is controlled by two processes, namely, (i) the filling of spaces between interconnections and (ii) the flattening of the interface between the polymeric liquid and elastic film. It was found that the time necessary to achieve the flattening of the top surface of the liquid film becomes constant as the velocity of pressing the top rigid plate becomes larger.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-10-15
著者
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Doi Masao
Department Of Applied Physics Faculty Of Engineering Nagoya University
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Taniguchi Takashi
Department Of Dermatology Faculty Of Medicine University Of Tokyo
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Doi Masao
Department of Computational Science and Engineering, Nagoya University, Chikusa-ku, Nagoya 464-8603, Japan
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TANIGUCHI Takashi
Department of Computational Science and Engineering, Nagoya University
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Taniguchi Takashi
Department of Polymer Science and Engineering, Yamagata University, Jonan 4-3-16, Yonezawa 992-8510, Japan
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Taniguchi Takashi
Department of Biology, Kyoto Pharmaceutical University
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