Formation of the 1.014 eV Photoluminescence Cu Center in Cu-implanted Silicon Crystals and the Center’s Model
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概要
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Changes of photoluminescence intensity of the 1.014 eV Cu center (CuPL center) with annealing temperature for Si crystals implanted with a small amount of Cu were observed to investigate the effect of vacancies (V’s) on the formation of the center. Annealing the implanted samples above 500°C produced an appreciable amount of the CuPL centers, although strong suppression of the center formation occurred for the annealing temperatures lower than 600°C. Based on these observations together with several reported evidences, it was concluded that the presence of plenty of V’s produced by implantation was not favorable for the formation of the CuPL center and a model including no substitutional Cu was suitable for the center.
- 2004-11-15
著者
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Ohno Hideki
Department Of Gastroenterology Graduate School Of Medicine University Of Tokyo
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Murakami Susumu
Hitachi Research Laboratory Hitachi Ltd.
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Nakamura Minoru
8-704, 11 Ban, Ishikawa-cho, Hitachinaka 312-0057, Japan
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Murakami Susumu
Hitachi Research Laboratory, Hitachi Ltd., 1-1, 7-Chome Omika-cho, Hitachi 319-1292, Japan
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Ohno Hideki
Department of Physics, Tokyo National College of Technology 1220-2 Kunugida, Hachiouji, Tokyo 193-0997, Japan
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OHNO Hideki
Department of Gastroenterology and Cancer Gene Regulation, Kanazawa University Graduate School of Medical Sciences
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