指向性真空計による真空装置の漏れ検出 : 点状気体放出源の測定に関する解析

概要

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The application of an unidirectional vacuum gauge to the leak detection of a vacuum chamber is examined theoretically. The informations contained in the output signal of the gauge that sees a point gas source in a vacuum chamber are analyzed and its results are applied to the problem of the leak detection of large scale vacuum systems in numerical manner. The lower limit of detection correlates with various factors of both the performance of the unidirectional vacuum gauge and the property of the vacuum system. Sharp directivity, high signal to background ratio, and high sensitivity are desirable for the gauge. When the leak rate is far smaller than the total outgassing rate of the system, it is difficult to detect the leak even if one uses the gauge with high performances.
日本真空協会の論文