MP-21 環境振動発電器のためのX線光電離を用いたエレクトレット荷電法(ポスターセッション)

概要

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We propose a novel charging method of electret using X-ray irradiation for MEMS power generator. Since X-rays can penetrate inside of the generator and make ions from gas molecules by photoiozation effect, charging of electret would be possible even after assembling/packaging process. In Ar atmosphere, surface potential of electret increases with irradiation time of X-rays and becomes constant as much as applied bias voltage. It is found that the charging rate much depends on the introduced gas species and pressure, which means the present charging principle should be different from conventional radiation-based charging methods. TSD spectrum of the charged electret with X-rays shows the stability of charged electret with X-ray irradiation is approximately the same as that of corona-charged electrets.
一般社団法人日本機械学会の論文
2011-09-25