流体制御に用いるマイクロ・プラズマアクチュエータの変換効率に関する研究(<小特集>第1回マイクロ・ナノ工学シンポジウム)

概要

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Micro-plasma actuator is promising for active flow control because of large induced velocity without any moving parts. In the present study, MEMS plasma actuator has been developed and its mechanical and electrical responses are characterized. Experimental data for induced flow pattern and discharge current are in accordance with previous results using macro-scale devices. It is found that the optimal frequency for energy conversion efficiency depends on the electrode width. The maximum energy conversion efficiency is about 0.1%, which is much larger than that of macro-scale counter part. The present result also indicates that the energy conversion efficiency increases as the thickness of dielectric substrate decreases.
2010-08-25