MNM-P4-3 付着力の熱的制御を用いたマイクロマニピュレーション(P4 ナノ・マイクロ異相界面センシングと制御)

概要

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The objective of this study is the development of meniscus tip thermally controlling mainly the meniscus force which is one of the adhesion forces. The meniscus tip, having small heater on water-filled capillary tube, can control the meniscus force through varying wet state of the tip by supplying or drying water. To evaluate the adhesion characteristics, the measurement of adhesion force between the tip surface and the micro object was conducted and the reduction of adhesion force of 10 μN was indicated by its measurement in the heating rate of 0.9 W. Moreover, it was confirmed by the observation of the tip surface during heating that the increase of adhesion force at 0.25 W in the result of adhesion force measurement was caused by the seeping of the inner liquid. Additionally, the micromanipulation of the glass beads of 100 μm diameter was demonstrated.
一般社団法人日本機械学会の論文
2010-10-12