MEMSセンサによる核沸騰熱伝達機構の研究 : 第1報,気泡底部の局所温度計測(熱工学,内燃機関,動力など)

概要

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Local temperature variation beneath boiling bubble was measured with a MEMS (Micro Electro-Mechanical Systems) integrated sensor to investigate a boiling heat transfer mechanism. The sensor consisting two trigger heaters and six thin film thermocouples across the heaters within 880 μm region on a silicon or glass substrate can measure temperature distribution of heating surface with less than 0.1 ms temporal resolution. As a result, measured temperature variations can be brought into correspondence with the bubble behavior taken by a synchronized high-speed video. The temperature variations also show a formation of micro layer, extension of a local dryout region and rewetting with bubble departure. Based on the measurement, a state transition chart of the heating wall beneath the bubble in temporal and spatial domain can be drawn. This study presents a new approach method to the heat transfer mechanism of mucleate boiling.
一般社団法人日本機械学会の論文
2006-10-25