H123 MEMS カンチレバーセンサーによる微小熱計測の試み

概要

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Micro-cantilever shows a high-speed and high-sensitivity response to a thermal input because it has high thermal resistance and small thermal capacity. Three attempts in thermal measurements with MEMS cantilever sensors will be presented. First, a quantitative temperature measurement in SThM was realized by a thermal feedback method with a multi-functional cantilever probe. Second, a radiation temperature measurement system impervious to a variation in sensitivity of an amplifier and the sensor was demonstrated by a similar feedback method. Third, the cantilever prove for SThM was applied to a thermal analysis. Solidification and melting of an alloy of less than 1μg was observed. The attempts each offer exciting prospects of exceeding the conventional technology.
一般社団法人日本機械学会の論文
2003-11-10