M5-6 マイクロマニピュレータ用メニスカスチップの研究(M5 アクチュエータ/フィジカルセンサ)

概要

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With a miniaturization of mechanical parts and devices in the engineering, the manipulation of them becomes more difficult. The change of the object scale from macro to micro requires new micromanipulation technology, fitting to micro physics. In the micromanipulation, the release action of a micro object is more difficult than the pick-up action because of the adhesion force larger than gravitational force. In this study, we focus the meniscus force which is important for the adhesion phenomenon in the micro scale. The purpose of this study is development of the manipulator tip which enables to control adhesion and detachment of the micro object by the control of the meniscus force. Two types of the tip were developed with thin glass pipe. Those Meniscus tip can control dry and wet states of the tip with heating near the tip. The ability of the thermal wetting control was confirmed by adhesion test.
2009-10-15