C134 零位式放射温度計測システムの開発 : 測定原理の検証と MEMS 複合センサの試作

概要

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A novel radiation temperature measurement method was invented. In the traditional radiation thermometry, an emissivity data of a sample is necessary for converting the detected radiation intensity into temperature with a particular calibration curve. On the other hand, temperature of the sample can be decided by finding the sensor temperature at which the radiation intensity is null in our method. Introduction of the null method into radiation thermometry eliminates the need for the emissivity value. The principle of the method was verified with a measurement system where a heater-equipped commercial thermopile device was driven with a thermal feedback circuit. Quantitative temperature measurement was achieved for the flat brass surface with black paint or with plastic tape. Furthermore, a integrated radiation sensor having a cantilever type thermopile, electric heater and thermocouple was made by the silicon micro-fabrication technology. Measurement test with the sensor showed that the method absorbs the difference in emissivity, and that local temperature distribution in the sensor influences the detection of radiation intensity.
2002-11-06