原子間力顕微鏡を用いた微小スケール温度場の計測

概要

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A new technique, which uses the Atomic Force Microscope (AFM) coupled with a micro-thermocouple cantilever, for measurement of microscale temperature profile has been developed. Topological and thermal images of any solid sample can be obtained simultaneously by this technique. Using a handmade thin-wire thermocouple and a thin-film thermocouple deposited on a commercially available Si_3N_4 cantilever, some working small electric devices were measured in both air and vacuum. Since heat conduction through the air between the sample and the probe was dominant in air, clear but distorted thermal images were obtained. In vacuum, heat transfer through the contact point between them was so small that a signal to noise ration was low and the conventional signal amplifying technique was not helpful. The Lock-in technique was employed to detect such small signals and finally, a true temperature image of sample surface was acquired. Also, the thermal environment surrounding the cantilever in the AFM is discussed in this paper.
一般社団法人日本機械学会の論文
1996-01-25