21002 高感度MEMSサーモパイルセンサを利用したバイオカロリメトリの研究(OS10 マイクロ・ナノ熱流体工学(1),オーガナイズドセッション)

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The differential bio-calorimeter with MEMS thermopile sensors was developed for nano-watt level metabolic heat measurement. This paper described the noise reduction characteristics of fourfold thermostat bath to outer temperature fluctuation and electric noise reduction characteristics of the thin film thermopiles and amplifier system including a zero-drift amplifier. Also, growth thermogram of Yeast was measured with the differential bio-calorimeter. As a result, the total noise level in the practical calorimetry was reduced under 100 nW by the developed system. Of the total noise, the electrical noise of the level of 22 nWrms over a frequency range higher than 1 mHz was recognized. For the thermal analysis of Yeast, the metabolic heat generation over 100 nW level was measured, and the minimum detection level was estimated at 100 nW.
2010-03-09