原子間力顕微鏡を用いた微小スケール熱計測 : 第2報, 温度・熱物性値分布計測

概要

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Experimental study on microscale measurement of temperature and thermophysical properties using the Atomic Force Microscope was conducted. Thermal and topological images were taken by scanning a gold film on nickel wire type thermocouple probe on sample with constant contact load. Visualization of temperature distribution of thin film resistor of 20μm square and thermal conductance distribution of composite material called CFRP were attempted. With reducing ambient gas pressure, heat transfer mode between the probe and sample changes from gas conduction to solid conduction through contact point, thus contrast of temperature image becomes weaker and spatial resolution improves from 30 μm to less than 1 μm. In the properties measurement, it has been demonstrated that sub-micron scale visualization of thermal conductance is possible by this method and resultant image is affected by sample geometry and thermophysical properties distribution.
一般社団法人日本機械学会の論文
1998-02-25