TFT SRAMを用いた3D-FPGAの開発(デザインガイア2010 : VLSI設計の新しい大地)

概要

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Monolithically integrated Thin-Film-Transistor (TFT) SRAM configuration circuits over 90nm 9 layers of Cu interconnect CMOS is successfully fabricated at 300mm LSI mass production line for 3-dimensional Field Programmable Gate Arrays (3D-FPGA). This novel technology built over the 9th layer of Cu metal features aggressively scaled amorphous Si TFT having 180nm transistor gate length, 20nm gate oxide, fully silicided gate, S/D, all below 400C processing essential to not impact underlying Cu interconnects. Low temperature TFT devices show excellent NTFT/PTFT transistor lon/loff ratios over 2000/100 respectively, operate at 3.3V, E-field scalable, and are stable for SRAM configuration circuits. We believe this 3D-TFT technology is a major breakthrough innovation to overcome the conventional CMOS device shrinking limitation.
2010-11-23