317 真空環境における微小領域でのマニピュレーションとマイクロ接合の研究(T02-2 マイクロナノメカトロニクス(2),大会テーマセッション,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

論文の詳細を見る
Recently, the mechanism composed of them is not seen though a minute composition material of each pm has come out. Then, a minute material is physically grasp, and the manipulator that can assemble a minute material mutually is made. It aims at the development of the micro manipulation system that a three-dimensional handling a small material is possible also under the vacuum or the plasma-environment not only air it like in the electron microscope and the plasma-process etc. The system for the micro manipulation that can be operated under the plasma environment/vacuum is constructed. And, handling a small material was examined with the operation. Moreover, a bonding and a fixed method of a minute material that uses the plasma irradiation and the ion beam, etc. are researched.
社団法人日本機械学会の論文
2008-08-02