微小物把持を目的にしたマイクロピンセットの形状検討(J21-1 メカノマイクロシステム,J21 マイクロメカトロニクス)

概要

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At present, very small gear and electrostatic motor are fabricated on silicon substrate using semiconductor micro processing technology, and it becomes necessity to process of these micro components. But, handling technology that can handle micro elements, as small as several to several ten micrometers, has not been developed yet. To solve this problem, the authors fabricated micromanipulator that can handle microelements of micromachine systems. Especially we focused on an end effector of micromanipulator. The goal of this study is the simulation of stress concentration of the end effector and design configuration of the end effector automatically using design optimization method.
一般社団法人日本機械学会の論文
2004-09-04