1-06-01 多層薄膜/電極/圧電基板構造の弾性境界波の解析と実験(弾性表面波デバイス)

概要

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The propagation characteristics and TCF (Temperature Coefficients of Frequency) Characteristics of Boundary Waves which concentrate the acoustic energy in the interface between the metal electrode and piezoelectric substrate using the structure of Multi-Thin Film Layers/Metal Electrode/Piezoelectric Substrates are described. The new boundary waves are obtained by using higher velocity materials than internal ones as the top surface thin film of multi-layer. We used the materials of structures of AIN, Al_2O_3/SiO_2/Al, Cu, Ag, Au/Rotated Y-X LiNbO_3 and LiNbO_3. The range of existence of boundary wave for thicknesses of thin films, electrodes on Y-X LiNbO_3 and TCF are shown. Experimental results show the good frequency response of admittance at 500MHz-range.
超音波エレクトロニクスの基礎と応用に関するシンポジウム運営委員会の論文
2007-11-14