インコネル基板上に作製した配向性AIN薄膜を用いた燃焼圧センサ

概要

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C-axis-oriented aluminum nitride (AIN) thin films were prepared on Inconel substrates by the rf magnetron sputtering technique. The full-width at half-maximum (FWHM) of the X-ray rocking curve of the AIN films was 5.7°, and the piezoelectric constant d_<33> was 2.4 pC/N. The deviation from the linearity of charges with pressures for the AIN films were 0.2% of a full scale at 0.4 MPa, which indicated a good linearity. Furthermore the AIN films was evaluated under combustion pressures in a single-piston 90 cc engine rotating up to 4000 rpm. The waveforms of the AIN films were similar to those of a commercial sensor. It is demonstrated that the AIN films have a good possibility as combustion pressure sensor elements.
社団法人日本セラミックス協会の論文
2007-05-01