Enhancement of Dry-Etching Durabilities by Energy or Etchant Quenching with Aliphatic, Aromatic and Alicyclic Homopolymers, Polymer Blends and Copolymers

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1999-07-30

著者

• SAITO Kyoichi

  Department of Materials Technology, Faculty of Engineering, Chiba University

• SAITO Toshihiro

  Department of Urology, Niigata Cancer Center Hospital

• Saito K

  Department Of Materials Technology Chiba University

• Saito Kyoichi

  Department Of Applied Chemistry And Biotechnology Chiba University

• Higaki K

  Sumitomo Electric Ind. Ltd. Hyogo Jpn

• KUSHIDA Masahito

  Department of Materials Technology, Faculty of Engineering, Chiba University

• HARADA Kieko

  Department of Materials Technology, Faculty of Engineering, Chiba University

• SUGITA Kazuyuki

  Department of Materials Technology, Faculty of Engineering, Chiba University

• Harada K

  Department Of Computer Science Kitami Institute Of Technology

• SUGITA Kazuyuki

  Graduate School of Science and Technology, Chiba University

• Kushida M

  Department Of Materials Technology Chiba University

• HARADA Keiko

  Department of Materials Technology, Faculty of Engineering, Chiba University

• Sugita K

  Faculty Of Pharmaceutical Sciences University Of Tokyo

• Sugita Kazuyuki

  Department Of Image Science And Engineering Chida University

• Harada K

  Department Of Materials Technology Chiba University

• Kushida Masahito

  Department Of Electrical Engineering Kanagawa University

• Saito Toshihiro

  Department Of Materials Technology Faculty Of Engineering Chiba University

• Sugita Kazuyuki

  Department of Graphic Engineering, Faculty of Engineering, Chiba University

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