Energy Quenching Effects on Dry-Etching Durability of Alicyclic-Aliphatic Copolymers and Polymer Blends Enhanced by Polymer-Chain Entanglement
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-03-15
著者
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SAITO Kyoichi
Department of Materials Technology, Faculty of Engineering, Chiba University
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Saito K
Department Of Materials Technology Chiba University
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KUSHIDA Masahito
Department of Materials Technology, Faculty of Engineering, Chiba University
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KAWAMOTO Kenryou
Department of Materials Technology, Faculty of Engineering, Chiba University
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HARADA Kieko
Department of Materials Technology, Faculty of Engineering, Chiba University
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SUGITA Kazuyuki
Department of Materials Technology, Faculty of Engineering, Chiba University
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