Dry-Etching Durability of Copolymers and Polymer Blends of Vinylnaphthalene or α-Methylstyrene with Methyl Methacrylate
スポンサーリンク
概要
- 論文の詳細を見る
Dry-etching durabilities of poly (2-vinylnaphthalene-co-methyl methacrylate), the blend of poly (2-vinylnaphthalene) and poly (methyl methacrylate) [PMMA], and poly (α-methylstyrene-co-methyl methacrylate) films were studied as a function of vinylnaphthalene or α-methylstyrene content against four types of dry etching:1) O_2 plasma etching (O_2 PE), 2) O_2 reactive ion etching (O_2 RIE), 3) Ar^+ sputter etching (Ar SE), and 4) Ar ion beam etching (Ar IBE). Since the etching depth increased linearly with etching time the two-component polymer films were regarded to be etched uniformly without selected removal of aliphatic monomer units. Substantial enhacement of the durability was observed by incorporating or blending small amounts of aromatic moiety into PMMA for physical etching (Ar SE, Ar IBE) and physical/chemical etching (O_2 RIE) as well as chemical etching (O_2 PE). O_2 RIE is a synergetic process involving both physical bombardment and chemical reaction.
- 社団法人応用物理学会の論文
- 1995-08-15
著者
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UENO Nobuo
Department of Materials Technology, Faculty of Engineering, Chiba University
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Ueno Nobuo
Department Of Applied Physics Tohoku University
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Ueno Nobuo
Department Of Specialty Materials Faculty Of Engineering Chiba University
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KUSHIDA Masahito
Department of Materials Technology, Faculty of Engineering, Chiba University
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HARADA Kieko
Department of Materials Technology, Faculty of Engineering, Chiba University
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SUGITA Kazuyuki
Department of Materials Technology, Faculty of Engineering, Chiba University
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SUGITA Kazuyuki
Graduate School of Science and Technology, Chiba University
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Kushida M
Department Of Materials Technology Chiba University
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Sugita K
Faculty Of Pharmaceutical Sciences University Of Tokyo
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Sugita Kazuyuki
Department Of Image Science And Engineering Chida University
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IMAIZUMI Yoshiaki
Department of Image Science and Technology, Faculty of Engineering, Chiba University
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Kushida Masahito
Department Of Electrical Engineering Kanagawa University
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Imaizumi Y
Inst. Molecular Sci. Okazaki Jpn
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Harada Kieko
Department of Materials Technology, Faculty of Engineering, Chiba Univercity, 1-33 Yayoi-cho, Inage-ku, Chiba 263-8522, Japan
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Sugita Kazuyuki
Department of Graphic Engineering, Faculty of Engineering, Chiba University
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Harada Kieko
Department of Image Science and Engineering, Faculty of Engineering, Chiba University
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Harada Kieko
Department of Computer Science, Kitami Institute of Technology
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